机译:通过等离子体增强化学气相沉积制备的掺杂氢化纳米晶硅薄膜的表征
Department of Physics,School of Science,Beihang University,Beijing 100083,China;
Department of Physics,School of Science,Beihang University,Beijing 100083,China;
PECVD; doped hydrogenated nanocrystalline silicon film; microstructure;