Institute of Microelectronics, Peking University, Beijing 100871, China;
Institute of Microelectronics, Peking University, Beijing 100871, China;
Institute of Microelectronics, Peking University, Beijing 100871, China;
Institute of Microelectronics, Peking University, Beijing 100871, China;
substrate optimization; selectively grown porous silicon (SGPS); radio frequency; crosstalk isolation;