Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China;
Department of Optoelectrical Engineering,Nanfing University of Posts and Telecommunications,Nanjing 210003,China;
Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China;
Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China;
magnetic microactuator,macromodel,microelectromechanical systems (MEMS);