State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams,School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams,School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
magnetron sputtering, PIC/MCC, sputtering yield;