^pKey;
Laboratory;
of;
Functional;
Materials;
for;
Informatics,;
Shanghai;
Institute;
of;
Microsystem;
and;
Information;
Technology;
Chinese;
Academy;
of;
Sciences,;
Shanghai;
200050,;
China;
^pUniversity;
of;
Chinese;
Academy;
of;
Sciences,;
Beijing;
100039.;
China;
NMOSFET; 深亚微米; 总剂量; 半导体场效应晶体管; 照射; Si/SiO2; 反应; 偏置;