Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation

著录项

• 来源
  《中国物理：英文版》 |2014年第11期|661-665|共5页
• 作者

  Shen Ze-Nan; Xia Yang; Liu Bang-Wu; Liu Jin-Hu; Li Chao-Bo; Li Yong-Tao;

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• 作者单位

  Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China;

  Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China;

  Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China;

  Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China;

  Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China;

  Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China;

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• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词