机译:影响锗衬底上砷化镓质量的两个关键因素
School of Energy and Power Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;
State Key Laboratory of Functional Materials for Informatics, Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;
School of Energy and Power Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;
State Key Laboratory of Functional Materials for Informatics, Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;