机译:共振模式对空气中压电微悬臂梁性能的影响,重点是扭转模式
Saarland University, Chair of Micromechanics,Microfluidics/Microactuators, 66123 Saarbrücken, Germany;
National University of Defense Technology, College of Mechanical Engineering and Automation, Changsha 410073, China;
Saarland University, Chair of Micromechanics,Microfluidics/Microactuators, 66123 Saarbrücken, Germany;
National University of Defense Technology, College of Mechanical Engineering and Automation, Changsha 410073, China;
Saarland University, Chair of Micromechanics,Microfluidics/Microactuators, 66123 Saarbrücken, Germany;