Effects of fluorine-based plasma treatment and thermal annealing on high-Al content AlGaN Schottky contact

著录项

• 来源
  《中国物理：英文版》 |2016年第11期|466-469|共4页
• 作者

  Fang Liu; Zhixin Qin;

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• 作者单位

  State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China;

  State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China;

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• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词