Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
Key Laboratory of Silicon Device and Technology, Chinese Academy of Sciences, Beijing 100029, China;
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
Key Laboratory of Silicon Device and Technology, Chinese Academy of Sciences, Beijing 100029, China;
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
Key Laboratory of Silicon Device and Technology, Chinese Academy of Sciences, Beijing 100029, China;
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
Key Laboratory of Silicon Device and Technology, Chinese Academy of Sciences, Beijing 100029, China;
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
Key Laboratory of Silicon Device and Technology, Chinese Academy of Sciences, Beijing 100029, China;