机译:TiN制成的高质量因子超导共面波导
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China;
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
Synergetic Innovation Center of Quantum Information & Quantum Physics, University of Science and Technology of China, Hefei 230026, China;
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
Synergetic Innovation Center of Quantum Information & Quantum Physics, University of Science and Technology of China, Hefei 230026, China;