Liquid phase epitaxy magnetic garnet films and their applications

摘要

Liquid phase epitaxy (LPE) is a mature technology. Early experiments on single magnetic crystal films fabricated by LPE were focused mainly on thick films for microwave and magneto–optical devices. The LPE is an excellent way to make a thick film, low damping magnetic garnet film and high-quality magneto–optical material. Today, the principal challenge in the applied material is to create sub-micrometer devices by using modern photolithography technique. Until now the magnetic garnet films fabricated by LPE still show the best quality even on a nanoscale (about 100 nm), which was considered to be impossible for LPE method.