<正>Vol.43,No.3,2007 NEXT GENERATION LITHOGRAPHY——IMPRINT LITHOGRAPHY DING Yucheng LIU Hongzhong LU Bingheng LI Dichen (State Key Laboratory of Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China) 1
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机译:School of Energy and Power Engineering, Jiangsu University, Zhenjiang 212013, P. R. China 2 School of Chemistry and Chemical Engineering, Yancheng institute of technology, Yancheng 224051, P. R. China 3 School of Chemistry and Chemical Engineering, Jiangsu University
机译:Junkai Li, Hui Wan, Haisheng Lv, Guofeng Guan* College of Chemistry and Chemical Engineering Nanjing University of Technology Nanjing 210009, PR China E-mail:guangf@njut. edu. cn