未确认Mura分析及改善对策

摘要

As to the TFT-LCD and other display monitors, Mura is a relatively normal defect which will degrade the display quality greatly. The analysis of the unknown Mura, indicated that the active remain in the Fan-out area are the main reason of the unknown Mura, and a novel method is introduced to solve this defect by changing the condition of Photo process. The mass production feasibility of this method has been demonstrated through experimentation.%未确认Mura是一种能够影响TFT-LCD画面品质的不良.文章对未确认Mura不良进行了详细的分析,认为扇形区域出现有源层残留是导致未确认Mura不良发生的原因,介绍了一种通过变更曝光工艺条件来解决此种不良的方法,并通过试验论证了此方法的量产可行性.