A low-noise voltage reference is presented to enhance resolution of MEMS capacitive accelerometer and reduce system noise,in which the circuit uses Chopper stabilization(CHS) technique for the suppression of low-frequency noise.A 3.7V voltage reference chip is fabricated in a 0.5-μm CMOS process.Compared with the voltage reference without using CHS,the proposed design is much more superior in low-noise performance.Experimental results indicate that the output noise of reference voltage V RP can reach 0.121μV/sqrt(Hz) at the vicinity of 3 Hz.
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