A Vacuum Microelectronic Pressure Sensor Array Integrated with Temperature Sensor

SU Jie; XIA Shanhong; CHEN Shaofeng

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A Vacuum Microelectronic Pressure Sensor Array Integrated with Temperature Sensor

机译：集成温度传感器的真空微电子压力传感器阵列

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摘要

This paper presents a microsystemthat integrates a Vacuum Microelectronic pressuresensor array with a temperature sensor. The Vac-uum Microelectronic pressure sensor array consists of4 × 4 sensing elements. The temperature sensor is aPt-thin-film resistor. Computer aided design is usedto optimize the structure.

机译：本文提出了一个集成了真空微电子压力传感器阵列和温度传感器的微系统。 Vac-uum微电子压力传感器阵列由4×4个传感元件组成。温度传感器是一个铂薄膜电阻器。计算机辅助设计用于优化结构。

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来源
《中国电子杂志（英文版）》 |2001年第3期|332-335|共4页
作者
SU Jie; XIA Shanhong; CHEN Shaofeng;
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作者单位

State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China;

State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China;

State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China;

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原文格式 PDF
正文语种 chi
中图分类无线电电子学、电信技术;
关键词
Vacuum microelectronics; Pressuresensor; Temperature sensor;

机译：真空微电子;压力传感器;温度传感器;

A Vacuum Microelectronic Pressure Sensor Array Integrated with Temperature Sensor

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