College of Mechatronics and Control Engineering.Shenzhen University;
Shenzhen 518060;
China;
College of Physics and Optoelectronic Engineering;
Shenzhen University;
Shenzhen 518060;
China;
School of Mechanical Engineering and Automation;
Beihang University;
Beijing 100083;
China;
The General Engineering&Techmology Research Institute;
Liverpool John Moores Universit;
Liverpool L33AF.UK;
Ceramic matrix composite; Drilling force modelling; Kinematics analysis; Rotary ultrasonic drilling; Specific drilling energy; Vibration diminishing effect;