^pof;
Optoelectronic;
Science;
and;
Engineering,;
Huazhong;
University;
of;
Science;
and;
Technology,;
Wuhan;
430074,;
China;
^pNational;
Laboratory;
for;
Optoelectronics,;
Wuhan;
430074,;
China;
氧化钒薄膜; 测辐射热计; 红外吸收; 多孔硅; 非制冷; 微细加工技术; XRD测试; 原子力显微镜;