^pCenter;
for;
Space;
Optical;
Engineering,;
Harbin;
Institute;
of;
Technology,;
Harbin;
150080,;
China;
^pof;
Opto-Electronics,;
Harbin;
Institute;
of;
Technology,;
Harbin;
150080,;
China;
^pfor;
Composite;
Material,;
Harbin;
Institute;
of;
Technology,;
Harbin;
150080,;
China;
光学设计; 光刻技术; 集热器; EUV; 计算机程序; 收集效率; 强度分布; 光学参数;