State;
Key;
Laboratory;
of;
Functional;
Materials;
for;
Informatics,;
Shanghai;
Institute;
of;
Microsystem;
and;
Information;
Technology,;
Chinese;
Academy;
of;
Sciences,;
Shanghai;
200050,;
China;
硅纳米线; 紧凑型; 波导; 设计; 产品; ITU-T; 多模干涉; 高折射率;