平面宏微驱动系统微动台的刚度计算

摘要

For the system of macro micro-feed table,a micro-feed table in macro-micro dual system was designed by using of flexure hinge.The 2D stiffness matrix was derived from principle of minimum potential.And the stiffness matrix was applied to micro-feed table which contained flexure hinges.A simplified computation model of the micro-feed table was obtained.The results of simplified model were compared with finite element model and laboratory results.The effectiveness and practicality of the method were tested and verified.%针对宏微进给系统,利用弹性铰的微变形原理设计了宏微系统中的微动台.采用最小位能原理推导出一般弹性铰的二维刚度矩阵;并将此刚度矩阵应用于设计有弹性铰的微进给平台中,给出了所设计的微动台简化的计算模型.将简化模型计算结果与有限元计算结果和实验结果比较,结果证明了该方法的有效性和实用性.