Simulation of Passivation Process of Coaxial High Purity Germanium Detector

摘要

High purity germanium materials are expensive,and the device fabrication process is long.Therefore,the physical characteristics of semiconductor devices need to be simulated by simulation software before the experiment,so as to improve the experimental efficiency and reduce the cost.The process simulation module ATHENA of Silvaco TCAD software was used to simulate the surface passivation process of coaxial high purity germanium detector.The simulation results are shown in Fig.1.