Research on Driving Characteristics of High Speed Flyer Using KrF Laser

摘要

KrF excimer laser(248 nm)has high spatial uniformity by using induced spatial incoherence technology.After image relay and amplification by optical angular multiplexing technology,non-uniformity of image surface of focal spot is 1.6%.The spot spatial uniformity decreases with increasing distance of deviating image surface,the spatial non-uniformity is up to 5%at 3 mm place