惰性气体熔融-红外光谱法测定硅中的氧

摘要

采用惰性气体熔融-红外吸收光谱法测定硅中的氧，选择锡囊和镍篮做助熔剂，样品称样量为0.05 g，分析功率为4.5 kW。实验结果表明，样品释放完全，测定结果的相对标准偏差为4.67%（n=5），用GSBH 40104-1996标准样品进行加标回收试验，回收率为94%～104%，精密度和准确度满足测定要求。%A method for determination oxygen in silicon by inert gas fusion-infrared absorption method was investigated. Tin capsules and nickel basket were selected as the flux, the sample mass was 0.02 g and analytical power was 4.5 kW. The satisfactory results of determination were obtained, which indicated that the relative standard deviations of measurement results were 4.67%(n=5) and the recovery was 94%-104% by test with GSBH 40104-1996 refference material.