半导体制造设备预维修调度的知识进化算法研究

摘要

设计了求解半导体制造设备预维修调度问题的知识进化算法方案,详细地阐述了方案的具体实现过程,并计算了其他文献中的仿真实例.仿真实验结果表明了提出的知识进化算法方案优于其他文献中的粒子群算法方案和先来先服务方案.%This paper researched the method based on knowledge evolution algorithm to solve the problem of semiconductor manufacturing equipment predicted maintenance scheduling. It illustrated the detailed realization of the method, and computed the example of other literatures. By comparison of the result, it can be found that the proposed algorithm illustrates its higher searching efficiency than the particle swarm optimization algorithm and first in first out(FIFO) method of other literatures.