State;
Key;
Laboratory;
of;
Digital;
Manufacturing;
Equipment;
and;
Technology,;
Huazhong;
University;
of;
Science;
and;
Technology,;
Wuhan;
430074,;
People's;
Republic;
of;
China;
空气静压轴承; 动态特性; 超精密; 非线性关系; 动力学行为; 精度要求; 高加速度; 阻尼系数;