稀释法发生低含量硫化氢气体方法的研究

摘要

研制了采用高精度质量流量控制器组成的气体稀释装置,并通过不同种类气体标准物质对稀释装置的性能进行评价.将装置用于低含量硫化氢气体的发生,经硫化氢气体标准物质对装置多次测试得出结论,稀释装置能够快速、准确发生低含量的硫化氢气体,且具有较好线性、准确度和重现性.%The gas dilution device consisted of mass flow controllers with high-accuracy is developed. It is evaluated by different kinds of gas reference materials and used to dilute hydrogen sulfide reference with low concentration finally. By several tests,a conclusion is that the gas dilution device with good linearity, accuracy and repeatability can be used to prepare hydrogen sulfide with low concentration quickly.