压力式气浮测力传感器静特性研究

摘要

In order to avoid dimensions coupling phenomenon in multi-axis force measurement, the method of force floating measurement is proposed. The operation principle is described and the static characteristic equation is established about force floating measurement sensor based on pressure measurement. The experimental device for the sensor static characteristics has been developed and the experimental results are discussed . Results show when Pd in the range of 0. 5 ~ 3. 5 kg/cm2, sensor linearity is 0. 8% , hysteresis error is 0. 02% , and repeatability error is 0. 1% .%为了避免多维力测量过程中的耦合现象,提出了一种气浮测力的方法.研究建立了压力式气浮测力传感器的特性方程,研制了一种压力式气浮测力传感器静特性实验装置,对理论研究的结果进行了实验验证.实验结果表明,气腔内气体绝对压力Pd在0.5～ 3.5 kg/cm2范围时,气浮测力传感器的线性度为0.8％,回程误差为0.02％,重复性误差为0.1％.