新型移相量块干涉仪的研制

摘要

研制了一台用于0.5 ～100 mm量块测量的新型移相量块干涉仪,分别以波长为633 nm和543 nm的两台稳频激光器作为测量光源,通过一根单模光纤引入到干涉仪内.高精密移相器实现5步移相干涉测量,CCD.相机采集干涉条纹并计算干涉条纹小数,被测量块长度采用多波长的小数重合法计算.移相量块干涉仪的测量不确定度达到U=0.015 μm +0.07 × 10-6L(L为量块长度,mm).%A gauge block interferometer for 0.5 ～ 100 mm by phase stepping interferometry is described.Two stabilized lasers,633 nm and 543 nm,are introduced into the interferometer using a single mode fiber.The interference fringes are taken using a CCD camera and the fractions of the fringes are calculated by five step phase stepping method with mechanical phase shift.The gauge block length is measured by the method of exact fractions.The uncertainty for gauge block measurement reaches to U =0.015 μm + 0.07 × 10-6L (L is the length of gauge block,mm).