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A study of cantilever-free instrumentation for nanoscale magnetic measurements.

机译:用于纳米级磁测量的无悬臂仪器的研究。

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摘要

The evolution of the Atomic Force Microscope (AFM) into the Magnetic Force Microscope (MFM) and Magnetic Resonance Force Microscope (MRFM) has had a substantial impact on the characterization of nanoscale phenomena. Detection of 10-17 Newtons per root Hertz has occurred with use of an ultra-sensitive cantilever along with optical interferometry methods within these geometries. The sensitivity of these platforms is dependent on the characteristics of the cantilever, where increased length and a low Young's modulus increase the force sensitivity (meters/newtons). Using IC fabrication techniques, the realization of generating cantilevers with this sensitivity is feasible, but stress compensation layers are required to prevent the free end from curling. Aside from the difficultly in fabrication, the cantilever based approach has one fixed spring constant yielding a finite detectable magnetic force range. An alternative approach incorporating the magnetic levitation of a magnet with an integrated reflector, known as the birdie, has been investigated.;The goals of the cantilever-free instrumentation are two fold: (1) To replace the traditional cantilever with a magnetically levitated birdie (which will be scaled down to investigate nanoscale phenomena) through the creation of a virtual cantilever; (2) Investigate the detectable magnetic force range (tunability) of the virtual cantilever. The first 1-D milli-levitation platform has been fabricated and its preliminary characterization has been performed, showing a minimum detectable force in the nano-Newton range with a 10X tunability in spring constant. This high degree of force sensitivity and tunability confirms the design and enables the use for magnetic sample investigation. To further increase the utility of the cantilever-free approach, the birdie has been magnetically levitated in 3D by control circuitry that has been developed and characterized. The magnetic behavior of the custom designed X, Y and Z coil sets have been measured and compared to finite element analysis (FEA). Experimental data sets were used to fit coefficients in a magnetic field expansion. The magnetic field predicted by the magnetic field expansion using the experimental coefficients were in good agreement to FEA results. For the control of the birdie in 3-D, a tracking system has been designed that determines the position of the birdie and generates a proportional response depending on the error signal. Marginal control of the birdie within the bore of the X, Y and Z coil sets has been shown. The cantilever-free platform was able to sense forces at the nano-Newton level. This was demonstrated by observing the deflection of the birdie in response to known magnetic fields generated by a test coil located on the top of the coil set. Demonstration of the approach to detect external magnetic fields brought on by a test coil has been accomplished and the nano-Newton force sensitivity verified through deflection of the sensitive element (birdie). The cantilever-free instrumentation in which the ultra-sensitive cantilever is replaced with a magnetically levitated birdie, has been demonstrated with 10X tunability in spring constant and nano-Newton force sensitivity.
机译:原子力显微镜(AFM)向电磁力显微镜(MFM)和磁共振力显微镜(MRFM)的演变对纳米现象的表征产生了重大影响。在这些几何形状中,使用超灵敏悬臂和光学干涉法可以检测到每根10-17牛顿的赫兹。这些平台的灵敏度取决于悬臂的特性,其中长度的增加和杨氏模量的降低会增加力的灵敏度(米/牛顿)。使用IC制造技术,实现具有这种灵敏度的悬臂的实现是可行的,但是需要应力补偿层来防止自由端卷曲。除了制造困难之外,基于悬臂的方法还具有一个固定的弹簧常数,可产生有限的可检测磁力范围。已经研究了一种将磁体的磁悬浮与集成反射器结合在一起的替代方法,称为小鸟。无悬臂器械的目标有两个:(1)用磁悬浮小鸟代替传统的悬臂。 (将缩小比例以研究纳米级现象),方法是创建虚拟悬臂; (2)研究虚拟悬臂的可检测磁力范围(可调性)。已制造出第一个一维毫悬浮平台,并已进行了初步表征,显示出纳牛顿范围内的最小可检测力,弹簧常数具有10倍的可调性。这种高度的力灵敏性和可调性证实了设计并使其可用于磁性样品研究。为了进一步提高无悬臂方法的实用性,小鸟通过已开发和表征的控制电路以3D方式磁悬浮。已测量了定制设计的X,Y和Z线圈组的磁性能,并将其与有限元分析(FEA)进行了比较。实验数据集用于拟合磁场扩展中的系数。利用实验系数通过磁场扩展预测的磁场与FEA结果非常吻合。为了控制3-D小鸟,已经设计了一个跟踪系统,该系统确定小鸟的位置并根据误差信号生成比例响应。已经显示了在X,Y和Z线圈组的孔内对小鸟的边际控制。无悬臂平台能够感应纳米牛顿级的力。这是通过观察小鸟响应于由位于线圈组顶部的测试线圈产生的已知磁场的偏转来证明的。已经完成了检测由测试线圈产生的外部磁场的方法的演示,并且通过敏感元件(小鸟)的偏转验证了纳米牛顿力灵敏度。用弹簧悬浮常数的10倍可调性和纳牛顿力灵敏度证明了无悬臂仪器,其中超灵敏悬臂被磁悬浮小鸟代替。

著录项

  • 作者

    Altemus, Bruce Adair.;

  • 作者单位

    State University of New York at Albany.;

  • 授予单位 State University of New York at Albany.;
  • 学科 Engineering Electronics and Electrical.;Nanotechnology.;Nanoscience.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 120 p.
  • 总页数 120
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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