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Numerical and experimental studies of heat transfer phenomena in microelectronic packaging.

机译:微电子包装中传热现象的数值和实验研究。

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In this thesis, two important heat transfer processes with electronic packaging applications--plasma arc discharge heat transfer and phase-change heat transfer are studied by numerical simulation and experimental methods. With plasma arc discharge heat transfer, the conservation equations for charged particle densities, electron temperature and Poisson's equation for the self-consistent electric field are solved simultaneously taking into account the potential drop in the gap during the discharge. The current flux and the heat flux to the wire are calculated. With phase change heat transfer, the heating and melting processes of the wire electrode during the ball formation process are simulated. These studies have direct applications in the manufacturing of semiconductor packaging equipment.; Several design aspects of the wire-bonding process will also be studied. Various designs for an auxiliary wand electrode used in the discharge will be studied by comparing the initial electric field intensity at the onset of the electronic flame off (EFO) discharge. The design improvement of a fine-pitch capillary is also proposed by considering the smallest symmetric ball size which can be formed from a bent tip wire.; A wide spectrum of numerical and experimental techniques are used as part of this research. Numerical methods including finite difference, control volume, finite element, and boundary element methods are employed in the research as well as CFD packages such as FIDAP and ANSYS. Laboratory studies required electronic data recording by high speed digital memory oscilloscopes, chemical etching, and SEM examination of the ball and wire samples.; The numerical results obtained from the arc discharge simulation and the ball formation simulation are in good agreement with experimental data. The current and heat flux to the wire obtained from the arc discharge simulation are close to the findings of the experiments. The calculations of ball size and temperature distribution along the wire from the ball formation simulation agreed very well with experimental data. This is shown by examining the ball size and grain structure of the wire which has gone through the heating and cooling process.
机译:本文通过数值模拟和实验方法研究了电子封装应用中的两个重要的传热过程-等离子弧放电传热和相变传热。利用等离子弧放电换热,同时考虑了放电过程中间隙中的电势降,可以同时求解带电粒子密度的守恒方程,电子温度和自洽电场的泊松方程。计算到导线的电流通量和热通量。利用相变传热,模拟了焊球在球形形成过程中的加热和熔化过程。这些研究直接应用于半导体封装设备的制造中。还将研究引线键合过程的几个设计方面。通过比较电子火焰放电(EFO)放电开始时的初始电场强度,将研究放电中使用的辅助棒电极的各种设计。考虑到可以由弯曲的尖端金属丝形成的最小对称球尺寸,还提出了细间距毛细管的设计改进。广泛的数值和实验技术被用作这项研究的一部分。研究中采用了包括有限差分,控制量,有限元和边界元方法在内的数值方法,以及CFD软件包,如FIDAP和ANSYS。实验室研究要求通过高速数字存储示波器记录电子数据,化学蚀刻以及对球和线样品进行SEM检查。电弧放电模拟和球形成模拟的数值结果与实验数据吻合良好。从电弧放电模拟获得的导线的电流和热通量接近于实验的结果。通过球形成模拟对球尺寸和沿线的温度分布的计算与实验数据非常吻合。通过检查经过加热和冷却过程的金属丝的球形和晶粒结构可以看出这一点。

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