Multi-wavelength infrared imaging computer systems and applications.

摘要

This dissertation presents the development of three computer systems for multi-wavelength thermal imaging.; Two computer systems were developed for the multi-wavelength imaging pyrometers (M-WIPs) that yield non-contact temperature measurements by remotely sensing the surface of objects with unknown wavelength-dependent emissivity. These M-WIP computer systems represent the state-of-art development in remote temperature measurement system based on the multi-wavelength approach. The dissertation research includes M-WIP computer system integration, software development, performance evaluation, and also applications in monitoring and control of temperature distribution of silicon wafers in a rapid thermal process system.; The two M-WIPs are capable of data acquisition, signal processing, system calibration, radiometric measurement, parallel processing and process control. Temperature measurement experiments demonstrated the accuracy of {dollar}{lcub}pm{rcub}1spcirc{dollar}C against blackbody and {dollar}{lcub}pm{rcub}4spcirc{dollar}C for colorbody objects. Various algorithms were developed and implemented, including real-time two-point non-uniformity correction, thermal image pseudocoloring, PC and SUN workstation data transfer, automatic IR camera integration time control, and radiometric measurement parallel processing.; A third computer system was developed for the demonstration of a 3-color InGaAs FPA which can provide images with information in three different IR wavelength range simultaneously. Numbers of functions were developed to demonstrate and characterize 3-color FPAs, and the system was delivered to be used by the 3-color FPA manufacturer.