Efficient mixed-domain analysis of electrostatic microelectromechanical systems (MEMS).

摘要

Computational analysis of electrostatic MEMS requires a self-consistent solution of the coupled interior mechanical domain and the exterior electrostatic domain. Conventional methods for coupled domain analysis, such as finite element/boundary element methods (FEM/BEM), require mesh generation, mesh compatibility, re-meshing and interpolation of solution between the domains. Mesh generation can be difficult and time consuming for complex geometries. Furthermore, mesh distortion can occur for micromechanical structures that undergo large deformations. To overcome all these difficulties, we present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEM devices are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method (FCM) based interior mechanical analysis with a boundary cloud method (BCM) based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analysis. Meshless finite cloud and boundary cloud methods combined with Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional FEM/BEM approach for self-consistent electromechanical analysis. The proposed full Lagrangian FCM/BCM approach has been successfully applied in numerical analysis and computer-aided design of several MEMS devices such as microswitches, micro mirror devices, comb drive microactuators and a micocompressor.