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Micro- and nano-cavity lasers for sensing applications.

机译:用于感测应用的微腔和纳米腔激光器。

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摘要

Lasers can be used for a multitude of sensing applications. This dissertation discusses two types of lasers for sensing applications. The use of an integrated vertical-cavity surface-emitting laser and photodetector as a position sensor is first detailed. Design, fabrication, and simulation of the position sensing capabilities are discussed. The use of a grating as the position gauge ultimately makes the range of measurement very large. Experimental demonstration of position sensing and velocity sensing is shown.;Photonic crystal membrane lasers, a type of nanoscale laser, are advantageous for sensing because of their compactness and ultra-small modal volume. Different aspects and properties of photonic crystal membrane lasers are discussed. The thermal characteristics of a photonic crystal laser are studied using a finite element method. Two new types of photonic crystal membrane cavity lasers are also presented and discussed: the decimated photonic crystal cavity and the heterostructure photonic crystal cavity. The later cavity is analyzed in greater detail via experiment and simulation.;Progress towards creating an electrically injected photonic crystal emitter is also discussed. The materials design and fabrication technique are presented. Here, the devices are fabricated in the InGaAs/GaAs material system. An oxidation layer is used to create a current aperture as well as to provide index contrast to the photonic crystal membrane. Calculations pertaining to the quality factor of the cavities in the diode configuration are presented. A fabrication sequence and required process development is discussed, as well as progress toward laser diode fabrication.
机译:激光可用于多种传感应用。本文讨论了两种用于传感应用的激光器。首先详细说明将集成的垂直腔面发射激光器和光电探测器用作位置传感器。讨论了位置感应功能的设计,制造和仿真。光栅作为位置计的使用最终使测量范围非常大。显示了位置感测和速度感测的实验演示。光子晶体膜激光器是一种纳米级激光器,由于其紧凑性和超小模态体积而非常有利于感测。讨论了光子晶体膜激光器的不同方面和特性。使用有限元方法研究了光子晶体激光器的热特性。还介绍和讨论了两种新型的光子晶体膜腔激光器:抽取的光子晶体腔和异质结构光子晶体腔。通过实验和仿真对后面的腔进行了更详细的分析。;还讨论了创建电注入光子晶体发射器的进展。介绍了材料设计和制造技术。在这里,器件是在InGaAs / GaAs材料系统中制造的。氧化层用于产生电流孔并为光子晶体膜提供折射率对比。提出了与二极管配置中的腔质量因数有关的计算。讨论了制造顺序和所需的工艺开发,以及激光二极管制造的进展。

著录项

  • 作者

    Giannopoulos, Antonios.;

  • 作者单位

    University of Illinois at Urbana-Champaign.;

  • 授予单位 University of Illinois at Urbana-Champaign.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2010
  • 页码 93 p.
  • 总页数 93
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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