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A motionless gas micropump using thermal transpiration in bulk nanoporous materials.

机译:使用散装纳米多孔材料中的热蒸腾的固定式气体微型泵。

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摘要

Thermal transpiration-driven Knudsen pumps have the ability to pump gas molecules without the use of any moving parts. This promises high structural reliability and low frictional losses. However, the dearth of suitable transpiration materials with appropriate properties has limited their performance, especially for atmospheric pressure operation. This thesis describes the use of bulk nanoporous materials for thermal transpiration-driven gas pumping at atmospheric pressure.;A naturally-occurring zeolite, clinoptilolite, is used to demonstrate the feasibility of thermal transpiration-driven Knudsen pumps using bulk nanoporous ceramics. For an input power of 5.35W, the initial prototype has a temperature bias of 38K across the thickness of the zeolite disc. This results in a gas flow of ≈0.12sccm with a nominal pressure load of ≈50Pa at the output, or a maximum pressure head of ≈1kPa. Transient pressure response at the sealed outlet of a Knudsen pump is analyzed using a fitted model, which allows us to quantify various non-idealities.;Several other synthetic nanoporous ceramics are also evaluated for their thermal transpiration-driven gas flow characteristics. A clay-based ceramic 15PC is identified as suitable for multistage Knudsen pumps that may accommodate higher pressure heads. While operating at 55K above room temperature, a 9-stage Knudsen pump is demonstrated to generate a maximum pressure head ≈12kPa, or a gas flow of ≈3.8muL/min. against a pressure head of 160Pa. The pump has a footprint of ≈8x8mm2/stage. To date, a multistage Knudsen pump has operated continuously for more than 7000 hours without any deterioration in its performance.;Higher gas flow generation capabilities are demonstrated using thermal transpiration through nanoporous cellulose ester polymer membranes. For an input power of 1.4W, a single stage Knudsen pump with 11.5mm diameter and 105mum thick polymer membrane has a temperature bias of 30K across the membrane, which provides 0.4sccm flow against a 330Pa pressure head. Experiments suggest that the polymer Knudsen pump results in a thermal transpiration-driven gas flow of ≈1 sccm in absence of any external load. It has a final packaged volume of 14x14x4.5mm3. To date, a polymer pump has operated continuously for more than 600 hours without deterioration.
机译:热蒸发驱动的Knudsen泵无需任何运动部件即可泵送气体分子。这保证了高结构可靠性和低摩擦损失。然而,缺乏具有合适性能的合适蒸腾材料限制了它们的性能,特别是对于大气压操作。本文描述了大体积纳米多孔材料在大气压下由热蒸腾驱动的气体泵送中的应用。天然沸石斜发沸石被用来证明使用大体积纳米多孔陶瓷的热蒸腾驱动Knudsen泵的可行性。对于5.35W的输入功率,初始原型在整个沸石盘厚度上的温度偏差为38K。这导致气流为≈ 0.12sccm,在输出处的额定压力负载为≈ 50Pa或最大压力头为≈ 1kPa。使用拟合模型对Knudsen泵密封出口处的瞬态压力响应进行了分析,这使我们能够量化各种不理想情况;还对其他几种合成纳米多孔陶瓷的热蒸发驱动气流特性进行了评估。粘土基陶瓷15PC被认为适用于可容纳更高压头的多级Knudsen泵。在高于室温55K的温度下运行时,已证明9级Knudsen泵产生的最大压头为≈ 12kPa,或气流为≈3.8μL/ min。承受160Pa的压头。该泵的占地面积为≈ 8x8mm2 / stage。迄今为止,多级Knudsen泵已经连续运行了7000多个小时,而性能却没有任何下降。;通过纳米多孔纤维素酯聚合物膜的热蒸发,证明了更高的气流产生能力。对于1.4W的输入功率,直径为11.5mm,厚度为105mum的聚合物膜的单级Knudsen泵在膜上的温度偏差为30K,相对于330Pa的压头提供0.4sccm的流量。实验表明,在没有任何外部负载的情况下,聚合物Knudsen泵会导致热蒸腾驱动的气流约为1 sccm。最终包装体积为14x14x4.5mm3。迄今为止,聚合物泵已经连续运行600多个小时而没有劣化。

著录项

  • 作者

    Gupta, Naveen Kumar.;

  • 作者单位

    University of Michigan.;

  • 授予单位 University of Michigan.;
  • 学科 Engineering Electronics and Electrical.;Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2010
  • 页码 162 p.
  • 总页数 162
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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