磁控溅射超薄金属膜在太赫兹波段的光学特性

摘要

The metallic film, as an electromagnetic function film, exhibits manyparticular performances on basiS of physics effect of nano-structure.Theseelectromagnetic characteristics of nano-metallic films are decided by the basicelectromagnetic parameters, such as conductivity,dielectric function,andpermeabilitv.It is important to investigate the electromagnetic characterristicsof refractive index、absorption and transmission of super-thin metallic filmsin electromagnetic wave on Domains about Highly effective solar energy absorption,electromagnetic radiation,noise shield、absorption and purification. Ag、Cu、Co、Ni and Fe five kind of metals are investigated in this paper.Lookingfrom the electrical conductivity five materials are the good conductors,but theconductivity has the difference:In all these metals three materials are themagnetic material,two kind are nonmagnetic material.This article has studiedthe nanometer metallic films in terahertz wave band about optical characters,absorption coefficient、refractive index、transmission index and complexdielectric function of metallic films are investigated and calculated,theobvious size effect of nano-metallic films in terahertz band had beenproven,meanwhile,a reliable methord to extract optical constant is provided.Inthis thesis,the electromagnetic characteristics of nanometallic film areinvestigated to demonstrate that the performances of nano-metallic film can becontrolled and adjusted by the contrast the effect of metallic film thickness onthe optics characteristic and dielectric characteristic.I hope the results in thisthesis are useful for designing nano-electromagnetic function material used inthe electric devices.

目录

文摘

英文文摘

声明

第一章文献综述

1.1纳米金属薄膜的特点

1.2纳米金属薄膜的应用领域

1.3纳米金属薄膜的研究现状及发展趋势

1.4太赫兹波简介

1.5 THz辐射国内外相关研究进展

1.6本论文的目的、意义

参考文献

第二章样品的制备和分析测试原理

2.1薄膜样品的制备

2.1.1磁控溅射原理

2.1.2基片的洗涤方法

2.1.3薄膜样品的制备

2.1.4本试验所采用的实验设备

2.2薄膜的分析测试原理

2.2.1薄膜厚度的测量

2.2.2 THz时域光谱技术

2.2.3样品测试装置

2.2.4 THz时域透射光谱数据处理方法

参考文献

第三章超薄金属膜在太赫兹波段的光学特性以及复折射率的计算

3.1引言

3.2实验方法

3.2.1实验样品制备

3.2.2实验样品测量

3.3实验结果和讨论

3.3.1金属Fe、Co薄膜透射率，吸收系数和折射率

3.3.2金属Cu、Ni薄膜透射率，吸收系数和折射率

3.3.3金属Ag薄膜透射率，吸收系数和折射率

3.4关于复介电函数的计算

3.5结论

参考文献

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