Modified Adaptive Control of a 10,000 Square Foot Cleanroom Using Particle Counters to Maintain Design Specifications and Reduce Energy Consumption

摘要

Topic [Facilities Management -Utilities] Oral(X) Thomas A. Tribble PE , Craig Rochester , Michael Beauvais Abstract: As the post-construction resident facilities management team, we present the iterative steps planned and taken in order to reduce the energy profile of a 10,000 GSF, Class 100 - 10,000 research cleanroom. These steps have been planned and taken without sacrifice to initial design requirement or hindrance to installed ''tools''. We describe the process of taking a finished design and fully constructed all new cleanroom and modifying it. Our goal was to equal or exceed design specifications for air quality, but to significantly reduce the energy consumption of the HVAC systems serving this space. To achieve this goal we used twenty-six commercial particle counters, combined with a revised Building Automation System (BAS) control programming sequence to achieve these results. This change led to a series of additional alterations of cleanroom system components. Each of these alterations was monitored for particle performance in the cleanroom. The system changes completed have generated HVAC performance improvements and at the same time, significant energy savings. Background The Harvard University Laboratory for Integrated Science and Engineering (LISE) was presented in the Harvard University Capital Plan in 1999, and given a Certificate of Occupancy in 2007. An integral part of this 150,000 GSF research building was planned with a 10,000 GSF bay and chase cleanroom. The guidance for all designs for a modern building has its genesis in a document known as