Electrically Measurable Test Structures to Capture and Classify EUV Stochastics

摘要

Advanced technology nodes are demanding aggressive printability using EUV. EUV printing process inherently bringsin stochastic defects. To measure and experience various types of Stochastics in EUV printing, high volumemeasurements are deemed necessary. Furthermore the classification of the defects in terms of stochastic and systematicis also required. The permutation and combinations of shapes, sizes, and proximity driven stochastics errors are high innumbers, leading to significant increase in the number of test structures needed. Without electrically measurablesolutions, the defect test measurement exercise becomes impractical to perform visually. This paper will describe fewexamples of developing and handling the test structures capable to capture the defects and defect location and further toclassify the defects in terms of stochastic or systematic defects.