INVESTIGATING SCALING LIMITS OF A FIBER BASED RESONANT PROBE FOR METROLOGY APPLICATIONS

摘要

A combination of numerical modeling, finite element analysis and experimental results developed for standing wave probes at the tens of micrometer scale has been derived and used to design a scaled version of the probe system. By increasing the frequency and/or mode of the oscillating fiber, adhesion forces at the probe/surface interface can be overcome even though they are more dominant at the smaller scale. A prototype scaled probe is currently being fabricated using microfabrication techniques commonly used for MEMS devices.