DEVELOPMENT OF ACTIVE MOUNTS FOR IMPROVED ACCURACY OF LARGE MACHINE TOOLS

摘要

In order to improve the machining accuracy of large machine tools, two different prototypes of active mount were developed. One was composed of a hydraulic cylinder and a pair of miniature cylinder driven by linear actuators. Another was a combination of a hydraulic diaphram and a miniature cylinder driven by a linear actuator.rnBy a series of experiments, it was found that the both types of active mount had a capability of fine positioning with a resolution better than 0.1 μm but the responses were rather low, i.e. 1-3 Hz. From this result, the active mounts were considered to be effective in improving thernmachining accuracy if the table moved slowly such as a large surface grinder.