TRUEING OF MICRO-GRINDING WHEELS BY DIAMOND TOOLS

摘要

The micro-grinding process with diamond micro-grinding wheels and abrasive pencils enables a fast and high-quality fabrication of microstruc-tures in various hard and brittle materials. When using cubic boron nitride (CBN) as abrasive, even hardened steels can be machined by micro-grinding. Micro-grinding wheels are very suitable for the machining of straight and open structures, but usually they can only fabricate structures with rectangular geometries because of their restriction of profile. The usage of micro-grinding wheels with a special profile, as for example a V-profile, is uncommon. This is due to the fact that micro-grinding wheels with a special profile are difficult to manufacture. Furthermore, the renewing process after the profile has worn is difficult to accomplish. A new approach is the trueing of CBN micro-grinding wheels by diamond tools.