THE APPLICATION OF 3D OPTICAL SCANNING SYSTEMS FOR THE MEASURMENT OF SPHERICAL AND ASPHERIC SURFACES

摘要

In this paper, systematic errors of a WL scanning system have been briefly discussed. These errors are caused by the imperfection of different system components, where the common dominant systematic errors are the positioning error, table flatness and sensor error. A combined model for more than one systematic error has been discussed. The systematic errors discussed are unique for individual system. The character of the systematic errors may changes due to any change of the circumstance. However, the methods to study systematic errors discussed in the paper generally can be applied to the system within the same category.rnThis study shows how error compensation can be used in 3D scanning system to allow precision scanning of spherical surfaces. This can also be extended to spherical studies on aspheric surfaces.