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Diffracted Radiance leads to a Generalized Surface Scatter Theory and a Complete Systems Engineering Analysis of Image Quality

机译:扩散辐射导致广义表面散射理论和图像质量的完整系统工程分析

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Professor Bill Wolfe was an exceptional mentor for his graduate students, and he made a major contribution to the field of optical engineering by teaching the (largely ignored) principles of radiometry for over forty years. This paper describes an extension of Bill's work on surface scatter behavior and the application of the BRDF to practical optical engineering problems. Most currently-available image analysis codes require the BRDF data as input in order to calculate the image degradation from residual optical fabrication errors. This BRDF data is difficult to measure and rarely available for short EUV wavelengths of interest. Due to a smooth-surface approximation, the classical Rayleigh-Rice surface scatter theory cannot be used to calculate BRDFs from surface metrology data for even slightly rough surfaces. The classical Beckmann-Kirchhoff theory has a paraxial limitation and only provides a closed-form solution for Gaussian surfaces. Recognizing that surface scatter is a diffraction process, and by utilizing sound radiometric principles, we first developed a linear systems theory of non-paraxial scalar diffraction in which diffracted radiance is shift-invariant in direction cosine space. Since random rough surfaces are merely a superposition of sinusoidal phase gratings, it was a straightforward extension of this non-paraxial scalar diffraction theory to develop a unified surface scatter theory that is valid for moderately rough surfaces at arbitrary incident and scattered angles. Finally, the above two steps are combined to yield a linear systems approach to modeling image quality for systems suffering from a variety of image degradation mechanisms. A comparison of image quality predictions with experimental results taken from on-orbit Solar X-ray Imager (SXI) data is presented.
机译:比尔·沃尔夫(Bill Wolfe)教授是他研究生的杰出导师,他通过教授辐射学原理(通常被忽略)长达40年,为光学工程领域做出了重大贡献。本文描述了Bill在表面散射行为方面的工作的扩展,以及BRDF在实际光学工程问题中的应用。当前大多数可用的图像分析代码都需要BRDF数据作为输入,以便根据残留的光学制造误差来计算图像质量。此BRDF数据难以测量,很少用于感兴趣的短EUV波长。由于光滑表面近似,经典的Rayleigh-Rice表面散射理论无法用于即使是稍微粗糙的表面,也不能从表面计量数据中计算BRDF。贝克曼-基尔霍夫(Beckmann-Kirchhoff)经典理论具有近轴限制,仅为高斯曲面提供封闭形式的解决方案。认识到表面散射是一个衍射过程,并利用声音辐射原理,我们首先开发了一种非旁轴标量衍射的线性系统理论,其中衍射辐射在方向余弦空间中是不变的。由于随机粗糙表面仅仅是正弦相位光栅的叠加,因此开发这种统一的表面散射理论是对这种非近轴标量衍射理论的直接扩展,该理论对于任意入射角和散射角的中等粗糙表面均有效。最后,将上述两个步骤组合起来,以产生一种线性系统方法,可以对遭受各种图像质量下降机制的系统的图像质量进行建模。给出了图像质量预测与从在轨太阳X射线成像仪(SXI)数据获得的实验结果的比较。

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