ADDRESSING THE ENVIRONMENT, SAFETY AND HEALTH CHALLENGES OF THE 1999 INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS

摘要

The Technology Roadmap for Semiconductors is a comprehensive document that provides a 15 year outlook on technology requirements and possible solutions for the semiconductor industry. The Roadmap was previously a U.S. document, however the 1999 International Technology Roadmap for Semiconductors was a first of a kind international collaboration, indicating the need for world-wide cooperation in technology development. The Roadmap is divided into many technology areas dealing with design and test of devices, manufacturing processes, metrology, and simulation. In addition to these areas, there are crosscutting thrust areas that address challenges in several areas. The environment, safety and health (ESH) thrust is an example of such an area. Consistent with the format of the International Technology Roadmap for Semiconductors, ESH identified five difficult challenges for the semiconductor industry in the near term (five years) and long term (beyond five years). These challenges are: Chemicals, Materials, and Equipment Management, Climate Change Mitigation, Resource Conservation, Workplace Protection and ESH Design and Measurement Methods. Within these five difficult challenges, the roadmap identifies technology requirements and potential solutions and sets ESH goals for the industry to strive towards. Motorola recognizes the difficult ESH challenges identified by the Roadmap and has several programs in place to address these challenges for its semiconductor operations. In the semiconductor industry, Motorola is a recognized leader in addressing ESH issues.