A NOVEL METHOD FOR RAPID MICROFABRICATION

摘要

We introduce a novel microfabrication method using direct writing of photoresist with an ultrasonic microplotter equipped. First, the photoresist is driven into the pipette through capillary forces. The pipette is then used to directly write microfeatures on a polydimethylsiloxane (PDMS) substrate. The photoresist is cured on a hot-plate and used as a mold for replication. A second layer of PDMS is cast onto the mold. Once cured on a hot-plate, it is peeled off from the mold to obtain the desired microfeatures. We demonstrate that this method can be used for ultra-rapid and cost-effective fabrication of microchannels (39.65 urn wide) without need for clean room facilities.