Shearographic technique for NDE analysis of high frequency bending vibrations of microstructures

摘要

Investigation of dynamics of micro electromechanical systems (MEMS) is an important problem of engineering, technology and metrology. Specifically, recent interest in applying MEMS technology to miniaturization of relays, sensors, actuators for variety of applications requires design of appropriate testing and measurement tools for investigation of dynamic properties of those systems. Therefore, application of measurement technologies capable of detecting the dynamic properties of micro scale systems may help to understand and evaluate the functionality of those systems. The shearographic technique for the detection of the transverse displacements of micro-cantilevers with respect to the shearing direction is presented. The method is expanded upto a hybrid numerical-experimental approach and includes the generation of shearographic images of the microstructures using finite element methods. The presented analysis is based on modeling NDE shearographic method and microstructures behavior.