Electro-optical characterization of h-BN thin film waveguides by prism coupling technique

摘要

Waveguides were fabricated by deposition of boron nitride thin films onto galss substrates by a microwave plasma enhanced chemical vapor deposition (PECVD) process. We have characterized the optical linear properties of the as-deposited layers by m-lines spectroscopy. We have used a simple method based on the shift of the synchronous angles of the guided modes to investigate the electro-optic tensor r_(ij) using co-planar electrodes. With TM polarized light the value of r_(eff) computed is of the order of 5 pm V~(-1).