Indentation and Finite Element Modelling Investigations of the Indentation Size Effect in Aluminium Coatings on Borosilicate Glass Substrates

摘要

Nanoindentation is one of the few available methods and the most commercially widespread technique for investigating the elastic and plastic properties of small volumes such as thin films. Quantitative methods for obtaining the indentation (plane strain) modulus and hardness of a coating have been published and finite element models (FEM) of the elastic-plastic response of indentation have been developed. Comparison of the FEM output with actual indentation data has shown that, as the indentation size reduces, the apparent yield stress of the material increases. We have shown that the increase in yield stress is predictable and falls on a master curve (MRS Symp. Proc., Vol 788, p123, 2003). Predictions have been tested and agree for a range of metals (Cu, Al, W, Ir). This points to there being a fundamental length scale for dislocation-based deformation and raises the question as to whether the yield stress of thin films may be altered by reducing thickness. This study therefore investigates the indentation response of Al coatings on Borosilicate glass as a function of coating thickness and indentation depth. FEM of the indentation contact will be compared with indentation data and AFM measurements of the surface profile to investigate the relative contributions of the indentation size effect and the effect of hardening due to the additional constraint of substrate proximity to the plastic zone.