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Nanoindentation and magneto-optical study of oxidized Co thin films

机译:氧化Co薄膜的纳米压痕和磁光研究

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摘要

We have studied the mechanical and magneto-optical properties of postdeposition oxidized Co thin films. Oxidization process leads to the formation of double-layered structure of cobalt oxide on top of metallic cobalt. The nanoindentation measurements show decrease in hardness and Young's modulus at low annealing temperature and are related to increasing porosity of the film. The magneto-optical Kerr effect (MOKE) reveals dependence of the MOKE spectra on annealing temperature. The increased coercivity of the annealed films has been observed by MOKE and is related to the structure of the film.
机译:我们研究了沉积后氧化的Co薄膜的机械和磁光特性。氧化过程导致在金属钴的顶部形成氧化钴的双层结构。纳米压痕测量显示出在低退火温度下硬度和杨氏模量降低,并且与膜的孔隙率增加有关。磁光克尔效应(MOKE)揭示了MOKE光谱对退火温度的依赖性。通过MOKE已经观察到退火膜的矫顽力的增加,并且与膜的结构有关。

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