Nanofabrication of Planar High Temperature Superconducting Josephson Junctions Using Focused Ion Beam Technology

摘要

Superconductor-normal metal-superconductor (SNS) high-T_c Josephson junctions have been fabricated on c-oriented YBa_2Cu_3O_(7-δ) (YBCO) films. Focused ion beam (FIB) nano-structure modification (cutting of the film and local deposition of a metal) was used to form the junction with tungsten barrier. The junctions exhibit resistively shunted junction (RS.1) -like I-V characteristics.